PETEOS发射光谱分析

Optical Emission Spectroscopy Studies of PETEOS

现场采集ＰＥＴＥＯＳ发射光谱，分析和研究用等离子体正硅酸乙酯淀积氧化硅反应的机理和产物，并初步探究如何达到工艺控制，应用于生产的问题。

This paper discusses the mechanism and result in the condition that the SiO2 films were deposited by plasma─enhanced with (C2H5O)4Si.Furthermore,the anthors try to find out the way to make them under the control of technology and apply them in the manufacture.