激光化学汽相沉积球面微透镜的研究

STUDY OF FABRICATING MICROLENSES WITH SPHERICAL SURFACE BY LASER CHEMICAL VAPOR DEPOSITION

本文介绍了一种新颖的利用激光化学汽相沉积（ＬＣＶ）球面微透镜的技术。我们建立了一套ＬＣＶＤ的实验装置，用该装置在平面石英玻璃衬底上，成功地沉积生成了平凸型氨化硅球面微透镜。同时，还对沉积成的微透镜的参量进行了测试。在实验中还摸索了ＬＣＶＤ的沉积工艺。实验结果表明，通过控制源气体的化学配比与浓度，调节激光功率与衬底上的聚焦激光光斑尺寸，选择沉积时间，可以获得不同直径、透明、表面光滑的平凸型氮化硅球面微透镜。

in this paper, a novel technique of fabricating microlenses with spherical surface by laser chemical vapor deposition(LCVD)was introduced.An experiment installation of LCVD was established. By virtue of the installation a lot of piano-convex silicon-nitride micrlenses with spherical surface on flat quartz substrate was deposited successfully.The parameters of deposited microlenses were measured. In the experiments the tech+nology of deposition was groped.All of test results indicated that as long as the chemical mixture radio and concentration of source gases were controled,the laser power and the spot size on the laser-irradiated substrate were adjusted properly,the deposition time was selected appropriatelly,so the transparent piano-convex silicon-nitride microlenses with smooth spherical surface and different diameter could be obtained.