宏观颗粒影响薄膜性能的机理分析

The Effect of Macro-Particle Contamination on the Film Performance in Vacuum Arc Coating

基于界面能量理论，从微观的角度通过分析阴极其空电孤镀膜中，宏观颗粒（ＭＰ）到达基片后的自身发展形态与基片表面的相互影响以及与金属原子、离子之间的相互作用，揭示出ＭＰ影响薄膜性能的物理机制。分析表明，ＭＰ将增大薄膜表面粗糙度，降低薄膜附着力；使薄膜密度不均匀，膜层中ＭＰ与连续薄膜之间存在明显的分界面。理论分析的结果与实验结果相吻合；

In the process of vacuum are coathg,macro-particle (MP)contamination is one of themost important factors in the quality of the coating film Based on the theory of boundaryenergy, a theoretical analysis is made microscopically on the evolution of the MP itself andthe interaction between the MP and the substrate. It is shown that the growth of the MPwill affect the film performance;the surface roughness of the film is incre sed, the adhesionforce of the film is decreased,the film density tends to be nonuniformly distribuied and anObvious boundary is formed between the MP and the continuous film,Theoretical results a-gree well with experimental ones.