试剂水的制备

The fabrication of reagent water

讨论了化学试剂和水中的杂质对集成电路失败率的影响。介绍了试剂水的标准、制备方法和工艺流程，以及在设计试剂水系统时应注意材质选择、消毒灭菌等。还有不同供水方式对水质的影响。

In this paper the influence of the impurity content in chemical reagents and water on the failure rate of integrated circuits has been discussed. The standards for the reagent water, its fabrication and flow scheme are introduced. In addition, the problems concerning the selection of construction materials,sterilization method and the influence of water supply method on its quality have been discussed.