KrF准分子激光烧蚀氧化镁单晶的实验研究

Experiment studies of laser ablation of magnesium oxide crystal

本文采用光谱学和离子探针等检测手段，对ＫｒＦ准分子激光烧蚀氧化镁单晶的物理过程进行了实验研究。结果表明，激光烧蚀等离子体内的主要粒子形态是镁原子和一价的镁离子，其粒子的动能在３０～４５ｅＶ范围。从烧蚀部位的扫描电镜形貌分析表明，在激光能量密度近于烧蚀阈值时，激光辐照的氧化镁单晶表面呈现出一定程度的层离特征。

The Excime laser ablation of Magnesium oxide crystal was studied by emission spec-troscopy and ion probe diagnostic techniques. The experiment results show that the main particle species existed in the laser ablated plasma are Mg atoms and Mg￣+ ions. and their kinetic energy is in the range of 30 to 45eV. A threshold fluence for significant material removal of 3 J/cm￣2 was determined by abla-tion depth rate measurement.and below this value,surface damage in the form of micro-crack was ob-served.