准分子激光器中的X光预电离研究

The study of X-ray preionization for excimer laser

对于准分子激光器这样的高气压脉冲放电器件，为保证放电的均匀性，预电离是必不可少的。本文详细介绍了Ｘ光预电离的产生机理及实验装置，并进行了深入的实验研究及理论分析，对实际工作有较大的参考意义。

In order to assure the homogeneity of pulse discharge at high pressure such as excimer laser,the preionization is indispensable,In this paper,the generator of X-ray is introduced,and experimental re-sults and the theoretical calculations are analysed in detail.All of this is valuable for practice.