高精度SAW表面粗糙度传感器的研究与设计

Research and Design on High Accuracy SAW Surface Finish Transducer

提出了一种利用声表面波（ＳＡＷ）器件构成的新型高精度表面粗糙度传感器的设计方案，分析研究了它的工作原理、信号处理方法和动态静态特性。研究结果表明：它除了具有电感式表面粗糙度传感器的主要优点外，还具有灵敏度高、对外界温度和振动干扰不敏感、信号数字量输出等特点。当声表面波振荡器（ＳＡＷＯ）的中心频率为４０ＭＨｚ时，传感器可以得到１０ｋＨｚ／μｍ的位移灵敏度。

In this paper, a design idea of new type high accuracy SAW surface finish transducer is presented. The operating principle, the way of signal processing,the static and dynamic characteristics on the transducer are analysed and researched.Research results show that this transducer not only has main advantages of inductive surface finish transducer, but also has merits of much higher sensitivity and resolution,insensitive to environment temperature and vibration interferences, and signal with digital output form and so on. The transducer can obtain high displacement sensitivity of 10 kHz/μm and excellent linearity when the centre frequency of the surface acoustic wave delay-line oscillator is 40 MHz.