摘要
分析了光栅细分精度与利萨如图形的关系，给出了通过利萨如图形评定光栅细分精度的方法。该方法将对测量条件要求极高的细分误差评定工作转化为普通的电压测量和计算，使光栅细分精度的评定不再依赖于高精度的长度基准。该方法适用于各种误差模型的光栅信号，也适用于其它任何以相位差为９０°的两路信号进行细分计量仪器。
The relation between interpolation error and Lissajou's figure is analyzed for grating signals. It is found that the interpolation error can be evaluated by the roundness of Lissajou's figure. This technique is easily realized by voltage measurements instead of direct calibration which needs length reference of high accuracy. This method is applicable for grating signals with various kinds of errors, as well as other quadrature signals used for interpolation.
出处
《计量学报》
CSCD
1995年第1期6-11,共6页
Acta Metrologica Sinica
关键词
光栅
细分误差
利萨如图形
测量
Grating
Interpolation error
Lissajou's figure
