微小尺寸测量用直线驱动装置的原理及特性

The Principle and Performance of the Linear Driver Used for the Measurement of Microsize

叙述了一种采用电致伸缩原理利用压电晶体组件的变形实现精密直线微位移的装置，介绍了它的结构设计、控制波形及运动分析、电气驱动系统。在对该装置检测与试验的基础上对其速度控制特性进行了深入探讨，得出了有益的结论。

A device adopting the principle of electrostriction and using the deformation of piezoquartz unit to realize precise linear micro-displacement is described.The construction design,controlling waveform, motion analysis and electric driving system are introduced.On the basis of the test and experimentation on this device,the velocity controlling performance of the device is discussed deeply.The beneficial conclusions are achieved.