1K Murata, H Kawata, K Nagami. Studies of energy dissipation in resist films by a Monte Carlo simulation based on the Mott cross section[J]. J Vac Sci Technol, 1987,B5(1):124- 125.
2Masatishi Kotera, Ryoji Ijichi, Takafumi Fujiwara, et al. A simulation of electron scattering in metals[J].Jpn J Appl Phys, 1990, 29(10):2277- 2282.
3Masatoshi Kotera, Kenji Murata, Koichi Nagami. Monte Carlo simulation of 1 keV- 10 keV electron scattering in a gold target[J]. J Appl Phys, 1981, 52(2):997- 1003.
4Mott, Massey. The Theory of Atomic Collisious[ M]. London: Oxford University Press, 1965.
5I Adesida, R Shimizu, T E Everhart. A study of electron penetration in solids using a direct Monte Carlo approach[J]. J Appl Phys, 1980,51(11):5692-5969.
6Norihiko Samoto, Ryuichi Shimizu. Theoretical study of the ultimate resolution in electron beam lithography by Monte Carlo simulation including secondary electron generation: Energy dissipation profile in polymethylmethacrylate[J]. J Appl Phys, 1983,54(7): 3855 - 3859.
7EH威切曼.量子物理学:伯克利物理学教程(第四卷)[M].北京:科学出版社,1978..
8D F Kyser, K Murata. Quantitative electron microprobe analysis of thin film on substrate[R]. IBM: J Res Develop, 1974.