MEMS微悬臂梁构件变形规律的AFM试验研究

Experiments on the Deformation of MEMS Mciro-Cantilever Using AFM

采用原子力显微镜测试了微悬臂梁构件的弯曲变形规律。发现构件的弹性支撑是试验数据和理论计算出现误差的主要原因。引入支撑扭转等效刚度对探针-样品等效刚度计算公式进行修正。修正结果对大有效长度的构件与实测结果吻合良好。对短有效长度微悬臂梁,其误差原因主要为支撑的影响以及测试探针的大变形,论文进一步提出研究的建议。

Bending deformation of microscale cantilever has been investigated using an atomic force microscope（AFM）. The deformation of the elastic support of the cantilever is considered due to the error between the theoretical calculation and the experimental data. Therefore, support torsion stiffness is proposed to revise the current deformation calculation formula, which is proved to be available and effective to the micro cantilever with longer effective length. However, for the cantilever with shorter effective length, there are several additional reasons for the error, e. g. , nonlinear deformation of AFM probe, contact stiffness etc. Further research is suggested.