化学气相沉积难熔金属钼组织性能的研究

Microstructures and Properties of Molybdenum Coating Prepared by Chemical Vapor Deposition

介绍了化学气相沉积法制备难熔金属钼膜层的原理和方法。以MoF6 和H2 为原料,采用化学气相沉积法在纯铜基体上沉积出难熔金属钼膜层。分析研究了沉积层的组织、结构和硬度。实验结果表明:沉积膜层显微组织随沉积温度变化而不同,沉积温度较低时沉积层显微组织为细晶层状结构,沉积层硬度可达6 77HV ;沉积温度较高时沉积层显微组织为致密的柱状晶,硬度稍高于一般烧结钼。

This paper presents the principle and method of chemical vapor depositing molybdenum. Molybdenum coating is deposited on copper substrates from the mixture of MoF6 and H2. The microstructures and microhardness of the deposits are analyzed. The results show that the microstructures change with the variation of deposition temperature. The microstructures of deposited layer present a fine grains multilayered structure with a microhardness as high as 677 HV at relatively low deposition temperatures, while a compact columnar crystals microstructure is obtained at higher deposition temperatures.