两步法制备固体润滑FeS薄膜的摩擦磨损性能研究

Study on the Tribological Properties of FeS Solid Lubrication Films Prepared by Two-Step Method

通过两步法,即射频溅射Fe膜与低温离子渗硫复合处理工艺,在非黑色金属(单晶硅)表面得到了固体润滑FeS薄膜.利用X射线衍射仪研究了单质Fe膜与FeS薄膜的相结构,利用原子力显微镜和扫描电子显微镜观察分析了FeS薄膜的表面与擦伤磨损表面的形貌,用涂层划痕仪测量了FeS薄膜与基体的结合强度,用纳米压痕仪测定了FeS薄膜的纳米硬度及弹性模量,利用DD-92型摩擦磨损试验机评价了FeS薄膜的摩擦磨损性能.结果表明,两步法制备的FeS薄膜为金属Fe与固体润滑剂FeS共同组成的复合固体润滑薄膜,与其基体结合紧密,具有适当的表面硬度;FeS薄膜具有优异的减摩耐磨抗擦伤性能,摩擦系数与磨损量明显比45#钢原始表面的低,抗擦伤载荷明显提高.

Solid lubrication FeS films were prepared on non-ferrous metal （Si） surface by two-step method,namely composite processing between radio-frequency sputtering Fe and low temperature ion sulfuration.XRD was utilized to analyze the phase structures of metal Fe film and solid lubrication FeS film. AFM and SEM were used to observe and analyze their surface and worn morphologies. A scratching tester measured the bonding strength between films and substrate, and a nano indentation machine measured nano-hardness and nano-modulus of FeS film. Experiments were carried out on the friction-wear tester model DD-92.Results showed that FeS film prepared by two-step method is a kind of composite solid lubrication film composed with metal Fe and lubricant FeS, with good bonding and proper surface hardness. FeS film possessed excellent properties of friction-reduction, wear-resistance and anti-scuffing.