用特征多项式法设计PMP的误差补偿算法

Design of Error-offset Algorithms in Phase Measuring Profilometry by Characteristic Polynomials

提出了相位测量轮廓术(PMP)中相移算法的一种设计方法:特征多项式法。运用特征多项式法设计出了两种能同时抑制相移误差和谐波影响的误差补偿新算法,数值模拟验证了新算法对误差的抑制效果。该设计方法同样适用于相移干涉计量术。

A method is proposed that used the characteristic polynomials to design phase-shifting algorithms, Two novel algorithms are proposed to offset the effect of phase-shifting miscalib,ation and harmonics or detector nonlinearity. Computer simulation tests the tolerant capability of novel algorithms for these errors. The design method can also apply in Phase-shifting Interferometry.