摘要
介绍了一种带直流驱动电极交直流分离的MEMS开关,研究了影响开关阈值电压的因素,运用缩腰设计、尺寸优化等方法降低开关的阈值电压;运用阻抗匹配方法降低开关的反射损耗;利用等效电感的设计提高所需频段的隔离度。使用Coventor和HFSS软件模拟,设计的开关阈值电压小于20V,在X波段插入损耗低于0.1dB,反射损耗低于-25dB,谐振点处隔离度高于40dB。
A DC and AC separated MEMS switch was presented, the factors effected the threshold voltage of the switch are studied. The threshold voltage is lowered down by reducing the width of its signal line under the membrane, the reflecting loss is reduced by impedance matching. The frequency isolation is increased by using the inductance. Simulated by Coventor and HFSS, the switch results in a pull-in voltage less than 20 V, insertion loss less than 0.1 dB, return loss less than -25 dB at X band, and isolation better than 40 dB at the resonant frequency.
出处
《微纳电子技术》
CAS
2005年第8期369-373,共5页
Micronanoelectronic Technology
