摘要
MEMS技术在医药科学技术的一个重要应用是植入人体内的生物微系统(BioMEMS)。该系统集微传感器、微驱动器、微流体系统、微光学系统及微机械元件于一体,用于体内器官的诊断、体内器官功能修复或替代,其治疗效果确切,已成为关系本世纪医学与人类健康进步的重要领域。本文介绍了近年来不同功能类别植入式BioMEMS的发展状况,说明了MEMS工艺、方法及材料在此领域的应用。
To date, the majority of the development effort in MEMS field has focused on sophisticated devices to meet the requirements of life science. A key application for microsystem are active microimplants for revolutionized medical diagnostics, medical restoring and substituting lost or impaired biological functions in humans by integration of sensors, actuators, microfluidics, microoptics and mechanical systems. And the achievements make the BioMEMS a new research field, which will contribute to the individual＇s medical condition and life science. This paper presents an introductory overview of the technology and the development of resent years of BioMEMS are introduced, and it shows some samples of the application of the MEMS technology and materials.
出处
《微纳电子技术》
CAS
2005年第8期374-379,共6页
Micronanoelectronic Technology
