摘要
设计了一种基于微机电系统(MEMS)的光纤压力传感器,证明了光纤MEMS压力传感器在工作状态下可以由法布里_珀罗腔的理论模型解释。推导出了在光纤MEMS压力传感器中硅横膈膜的压力与干涉光强的关系表达式,并对光纤MEMS压力传感器的模型进行了数值模拟,初步确定了在传感器的制作过程中各个物理量的取值。其中腔体半径为300μm、腔体深度为1.42μm、硅横膈膜厚度为23μm,为光纤MEMS压力传感器的加工和制作提供了理论基础。
The relation expression between pressure and interference light intensity was deduced in MEMS pressure sensor, and that microelectromechanical system (MEMS) pressure sensor could be explained by Fabry-Perot cavity theory model was demonstrated. Every parameter's value is ascertained, such as the radius of cavity, the deepness of cavity, the diaphragm thickness. It is prepared for the sequent process and fabrication for this optical fiber MEMS pressure sensor.
出处
《光学技术》
EI
CAS
CSCD
北大核心
2005年第4期491-493,共3页
Optical Technique
基金
江苏省高新技术基金资助项目(BG2003024)
关键词
光电技术
微光机电系统
数值模拟
干涉
dectro-optical technology
microelectromechanical-optical system(MOEMS)
numerical simulation
interference