五级金属油扩散泵的研制

Development of Five-stage Metallic Oil Diffusion Pump

本文介绍一种具有大排气量的五级金属油扩散泵的设计与调试。这种泵的主要特点是：工作压强范围宽、在较高压强下有较大抽速、最大出口压强较高。典型Ｋ－５００泵的抽速是大于１００００升／秒，极限压强低于６．６×１０－５帕，最大前级压强大于５４帕，加热功率８千瓦左右。

In this paper, we describe the design and shakedown of the five-stage metallic oil diffusion pump with large exhaust capaciy. The chief features of this kind of pump are the wider range of working pressure, the higher pumping speed at the higher pressure and the higher maximum forepressure. The performance of the typical pump K-500 is as follows: pumping speed>10000 L/s, ultimate pressure<6.6×10- Pa, maximum forepressure>54 Pa and heating power is about 8kW.