多弧涂层技术的轰击清洗和轰击加热

The Cleaning and Heating by Bombardment in PVD Technology

本文仅就多弧氮化钛涂层技术，以金属晶格理论、金属热电子学说和粒子间碰撞等理论，简述轰击清洗和轰击加热的作用及在实际生产中的应用。

This article briefly describes PVD TiN coating technology. It focuses on the effect of ion bombardment cleaning and heating, production application in terms of metal lattice theory, metal thermo-electron emission and theory of particle collision.