超高真空密封材料的进步

Progress of UHV Seal Materials

自从五十年代美国杜邦公司开发了氟橡胶之后，氟橡胶的应用数量与日俱增。我国真空装置是在六十年代采用氟橡胶作为密封材料的。经过了二十年的应用，到目前已广泛用于真空仪器、设备的密封上，并取得较好的密封效果。本文就氟橡胶２６在耐热性、透气性、出气率和失重作一简要的介绍，并就氟橡胶的关键性能一压缩永久变形的改进， 说明氟橡胶加工技术的进步。

Since the development of fluoro-elatomer by U. S. Dupant Co. in 50' s, the application of it is gradually increased. In 60' s, the fluoro-elastomer was used as seal material for vacuum equipment in our country. For 20 years, it is extensively used in the seal material of vacuum instrument, equipment and brought in better result for seal.In this paper, we made a simple introduction on heat resistance, gas permeability, outgassing rate and weightlessness of fluoro-elastomer 26. On the key performance of fluoro-elastomer the improvement of compression permanent deformation, the progress of machining technology of it was described.