一种四极质谱残余气体分析的实用方法

A Useful Method of Residual Gases Analysis with the Quadrupole Mass Spectrometer

高真空系统残气分析对提高电真空器件的性能、质量和寿命具有重要作用。四极质 谱计与微机联用是必然的趋势。四极质谱计与微机联用是必然的趋势。四极质谱定性分 析是定量分析的基础。绝对灵敏度常数法和相对灵敏度常数法可以通过四极质谱计的灵 敏度定义相互联系起来。以相对灵敏度常数法为基础，将四极质谱计与电离真空计结合 起来，进行分压强和总压强测定的方案具有很高的灵敏度，能得到更好的重复性。

The application of the residual gases analysis in high vacuum system is very important for improving the performances, the quality and the working life of various vacuum electronic devices. The combination of the quadrupole mass spectrometer with microcomputer is a visible tendency. The qualitative analysis with the quadrupole mass spectrometer is the quatitative analysis. The analysis method using the absolute sensitivity constant and the analysis method using the relative sensitivity constant can be combined each other through the sensitivity of the quadrupole mass spectrometer. Based on the analysis method using the relative sensitivity constant and the combination of a quadrupole mass spectrometer and an ionization vacuum gauge, the useful method measuring the partial and total preasures in the high vacuum system has a higher sensitivity and a better reproducibility.