摘要
本文所描述的仪器用来研究金属表面吸附气体分子的脱附现象。该仪器由脱附离子 的形成及检测两部分组成。电子枪可以实现电子束能量扫描。金属样品靶可以更换，并 能加热到１２００Ｋ。脱附离子的检测是由单极质谱计完成的。其后配有电子倍增器。仪器 的电极系统安装在不锈钢制成的真空腔内，通过陶瓷导管把真空腔壳体与各电极连接在 一起。系统能够耐受３００℃烘烤。该仪器性能稳定、可靠，有高的灵敏度和分辨率。
An instrument described in this paper can be used to research phenomenons of desorption of gas molecules from metal surface. It consists of two parts of formation and detection of desorbed ion. The electron gun can achieve energy scan of electron beam. The metal sample target can be changed and heated to 1200 K. Detection of the desorbed ions is finished by a monopole mass spectrometer,an electron multipler is provided, following it. The electrode system is mounted in stainless-steel vacuum chamber with connections to the various electrodes via,ceramic leadthroughs. This system can resist heat of 300℃. The instrument is stable and reliable and has high sensitivity and resolution.
出处
《真空》
CAS
北大核心
1989年第5期26-32,共7页
Vacuum
