摘要
为了满足残余气体分压强定量测定的需要,经探讨,提出了 DL-8ⅡA电离计规管 相对灵敏度β值的简易校准方法。本文介绍该方法的基本概念、公式及校准步骤与结 果。用本方法可以较方便地对常见气体进行β值测定,从而使本残气分压强定量测定 方法不必以复杂的压强标准为基础而具有实用价值。
In order to meet the needs of quantitative determination of partial pressure of residual gas, a simple calibration method of relative sensitivityβ value of DL-8 ⅡA ion gauge has been developed.The basic concept, formula, calibration procedure of this method and result are presented. The β value of common gasses can be easily calibrated by use of this method. It is not necessary fur the method of quantitative determination of the partial pressure of residual gasses to be dependent on the basis of the complex pressure standard and it is practically valuable.
出处
《真空》
CAS
北大核心
1989年第6期20-25,共6页
Vacuum