摘要
类金刚石碳膜(DLC)有极优良的性能,与金刚石膜(DF)类似。已有很多的应用。简 介了DLC膜的结构,性能,实用的制备方法及其在工具和模具等领域中的应用。
Diamondlike carbon film （DLC） has excellent properties which are similar to diamond film （DF）. The DLC film has been application in many fields. The structures, properties and the practical deposition method of DLC film and it＇s usage in tools and dies are briefly discussed in this paper.
出处
《新技术新工艺》
2005年第8期25-28,共4页
New Technology & New Process
关键词
DLC薄膜
特性
应用
工具
模具
DLC film, properties, application, tool, die.
