摘要
This contribution is focused on applications of spectroscopic methods for the precise control of deposition processes. In this context, the present study gives a review on selected combinations of conventional and ion deposition techniques with different broadband online spectrophotometric systems. Besides two systems operating in the VIS- and NIR-spectral range in combination with ion processes, also a monochromator system developed for conventional deposition processes in the DUV/VUV-spectral range will be discussed. The considerations will be concluded by a comparison of the major advantages of the specific combinations of processes with online monitoring concepts and by a brief outlook concerning future challenges.
This contribution is focused on applications of spectroscopic methods for the precise control of deposition processes. In this context, the present study gives a review on selected combinations of conventional and ion deposition techniques with different broadband online spectrophotometric systems. Besides two systems operating in the VIS- and NIR spectral range in combination with ion processes, also a monochromator system developed for conventional deposition processes in the DUV/VUV spectral range will be discussed. The considerations will be concluded by a comparison of the major advantages of the specific combinations of processes with online monitoring concepts and by a brief outlook concerning future challenges.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2005年第4期403-412,共10页
Optics and Precision Engineering
关键词
宽带
光学涂覆技术
薄膜
分光镜
optical coating
optical broadband monitoring
ion assisted deposition
ion beam sputtering
DUV
VUV
