摘要
Surface thermal lensing technique was developed into a high-sensitive apparatus for weak absorption test and defect analysis of optical coatings. A continuous-wave 1 064 nm Nd:YAG laser and a He-Ne laser were employed as pump source and probe source, respectively. Low noise photoelectrical components and a lock-in amplifier were used for photo-thermal deformation signal detection. In order to improve sensitivity, the apparatus configuration was optimized by choosing appropriate parameters, including pump beam spot size, chopper frequency, detection distance, waist radius and position of probe beam. Coating samples were mounted on a x-y stage. Different procedures, such as single spot, linear scan and 2-dimension area scan, could be performed manually or automatically. Various optical coatings were prepared by both electron beam evaporation and ion beam sputtering deposition. High sensitivity was obtained and low to 1×10 -7 weak absorption was tested in low-loss coating samples. For the sensitivity extreme of the system, 1×10 -8 absorption was reason out to be measured by surface thermal lensing technique. Very small standard deviation was achieved for the reproducibility evaluation. Moreover, a spatial resolution of 25 micron was proved according to the area scan which traced out the profile of photo-thermal defects inside optical coatings. The system was employed in the analyses of optical absorption, absorption uniformity and defect characterization, and revealed the relationship between laser-induced damage and absorption of optical coatings.
Surface thermal lensing technique was developed into a high-sensitive apparatus for weak absorption test and defeet analysis of optical coatings. A continuous-wave 1 064 nm Nd:YAG laser and a He-Ne laser were employed as pump source and probe source, respectively. Low noise photoelectrical components and a lock-in amplifier were used for photothermal deformation signal detection. In order to improve sensitivity, the apparatus configuration was optimized by choosing appropriate parameters, including pump beam spot size, chopper frequency, detection distance, waist radius and position of probe beam. Coating samples were mounted on a .x-y stage. Different procedures, such as single spot, linear scan and 2-dimension area scan, could be performed manually or automatically. Various optical coatings were prepared by both electron beam evaporation and ion beam sputtering deposition. High sensitivity was obtained and low to 1 × 10^-7 weak absorption was tested in low-loss coating samples. For the sensitivity extreme of the system, 1 X 10 g absorption was reason out to be measured by surface thermal lensing technique. Very small standard deviation was achieved for the reproducibility evaluation. Moreover, a spatial resolution of 25 micron was proved according to the area scan which crated out the profile of photo-thermal defects inside optical coatings. The system was employed in the analyses of optical absorption, absorption uniformity and defect characterization, and revealed the relationship between laser-induced damage and absorption of optical coatings.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2005年第4期430-434,共5页
Optics and Precision Engineering
基金
Project(No.011661076)fundedbyscienceandtechnologycommunityshanghaimunicipal.
关键词
光学涂覆技术
吸收能力
稳定性
激光技术
surface thermal lens
absorption
coating defect
optical coaling
sensitivity