摘要
High laser-induced damage threshold and large aperture were focuses on the studies of high power laser coatings. This paper reports the research activities at our center. Several measures were developed for evaluating characters of laser damage, including determination of laser induced damage threshold and detection of absorption based on surface thermal lensing technique. Defect was deemed to be the initial source of laser damage, and was the main factor restricting the laser damage resistance of optical coatings. The contribution of several kinds of typical defects to laser damage was analyzed, and some deposition measures were adopted to control and eliminate the origin of defect. Furthermore, some post-treatment methods were also employed to alleviate the influence of the defect and to improve the laser damage resistance. Correction mask was introduced to improve the thickness uniformity, and the thickness uniformity can be amended to less than 1% in the range of Φ650 mm. Preliminary investigation related to surface deformation was also conducted.
High laser-induced damage threshold and large aperture were focuses on the studies of high power laser coatings. This paper reports the research activities at our center. Several measures were developed for evaluating characters of laser damage, including determination of laser induced damage threshold and detection of absorption based on surface thermal lensing technique. Defect was deemed to be the initial source of laser damage, and was the main factor restricting the laser damage resistance of optical coatings. The contribution of several kinds of typical defects to laser damage was analyzed, and some deposition measures were adopted to control and eliminate the origin of defect. Furthermore, some post-treatment methods were also employed to alleviate the influence of the defect and to improve the laser damage resistance.Corrcction mask was introduced to improve the thickness uniformity, and the thickness uniformity can be amended to less than 1% in the range of φ650 mm. Preliminary investigation related to surface deformation was also conducted.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2005年第4期471-479,共9页
Optics and Precision Engineering
关键词
激光涂覆技术
LIDT
吸收能力
激光器
high power laser coating: laser induced damage threshold (LIDT)
defect
thickness uniformity
oxygen-plasma post-treatment: large aperture
surface deformation