摘要
A kind of absorptive thin film was designed and used in laser welding of SiO2, Si and LiNbO3. This absorptive thin film of three-layer metal-dielectric-metal structure is designed for further reducing the high reflectance of the Nd:YAG laser beam on the surface of the tin layer that is utilized as solder between the transparent parent materials. The actual absorption of laser energy in experiment exceeds 99%. This combination of absorber and solder transformed the laser energy into heat efficiently and decreased the minimum necessary incident laser power transmitting through the transparent parent materials. As a result, the damage of the parent materials, which is suffered from laser transmission, was avoided; On the other hand, mechanical stability of the welded materials had been improved. Experiment had been made to show the difference between welding with and without the absorptive thin film.
A kind of absorptive thin film was designed and used in laser welding of SiO2 , Si and LiNbO3. This absorptive thin film of three-layer metal-dielectric-metal structure is designed for further reducing the high reflectance of the Nd:YAG laser beam on the surface of the tin layer that is utilized as solder between the transparent parent materials. The actual absorption of laser energy in experiment exceeds 99 %. This combination of absorber and solder transformed the laser energy into heat efficiently and decreased the minimum necessary incident laser power transmitting through the transparent parent materials. As a result, the damage of the parent materials, which is suffered from laser transmission, was avoided; On the other hand. mechanical stability of the welded materials had been improved. Experiment had been made to show the difference between welding with and without the absorptive thin film.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2005年第4期492-499,共8页
Optics and Precision Engineering
基金
This research was supported by Hanslaser Ltd,National 863(2003AA311022)Project of China
National 973(2003CB314901)Project of China
关键词
光电子装置
封装工艺
薄膜
激光仪器
激光技术
absorber
absorptive thin films
laser welding
wave-guide
optical components
MEMS