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A novel absorptive thin film for laser welding in optoelectronic device capsulation 被引量:1

A novel absorptive thin film for laser welding in optoelectronic device capsulation
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摘要 A kind of absorptive thin film was designed and used in laser welding of SiO2, Si and LiNbO3. This absorptive thin film of three-layer metal-dielectric-metal structure is designed for further reducing the high reflectance of the Nd:YAG laser beam on the surface of the tin layer that is utilized as solder between the transparent parent materials. The actual absorption of laser energy in experiment exceeds 99%. This combination of absorber and solder transformed the laser energy into heat efficiently and decreased the minimum necessary incident laser power transmitting through the transparent parent materials. As a result, the damage of the parent materials, which is suffered from laser transmission, was avoided; On the other hand, mechanical stability of the welded materials had been improved. Experiment had been made to show the difference between welding with and without the absorptive thin film. A kind of absorptive thin film was designed and used in laser welding of SiO2 , Si and LiNbO3. This absorptive thin film of three-layer metal-dielectric-metal structure is designed for further reducing the high reflectance of the Nd:YAG laser beam on the surface of the tin layer that is utilized as solder between the transparent parent materials. The actual absorption of laser energy in experiment exceeds 99 %. This combination of absorber and solder transformed the laser energy into heat efficiently and decreased the minimum necessary incident laser power transmitting through the transparent parent materials. As a result, the damage of the parent materials, which is suffered from laser transmission, was avoided; On the other hand. mechanical stability of the welded materials had been improved. Experiment had been made to show the difference between welding with and without the absorptive thin film.
出处 《光学精密工程》 EI CAS CSCD 北大核心 2005年第4期492-499,共8页 Optics and Precision Engineering
基金 This research was supported by Hanslaser Ltd,National 863(2003AA311022)Project of China National 973(2003CB314901)Project of China
关键词 光电子装置 封装工艺 薄膜 激光仪器 激光技术 absorber absorptive thin films laser welding wave-guide optical components MEMS
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  • 1TU KN.Cu/Sn interfacial reactions: thin-film case versus bulk case[J].Materials Chemistry and Physics.1996,46:217-223.
  • 2CH.C.Lee,Y.CH.Chen.High temperature tin-copper joints produced at low process temperature for stress reduction[J].Thin Solid Films.,1996,286:213-218.
  • 3CH.C.Lee,S.Choe.Fluxless In-Sn bonding process at 140℃[J].Materials Chemistry and Physics.,2002,A333:45-50.
  • 4CH.Luo,L.Lin.The application of nanosecond-pulse laser welding technology in MEMS packaging with a shadow mask[J].Sensors and Actuators,2002,A97-98:398-404.
  • 5Y.ZH.Cao,X.F.Hu.Absorbing film on metal for solar selective surface[J].Thin Solid Films.,2000,375:155-158.
  • 6V.T.Bly,C.J.Thomas.Infrared absorber for ferroelectric detectors[J].Applied Optic.,1994,33:26-30.
  • 7J.J.Monzón,L.L.Sánchez-SOTO.Optical performance of absorber structures for thermal detectors[J].Applied Optic.,1994,33:5137-5141.
  • 8F.Lemarquis,G.Marchand.Analytical achromatic design of metal-dielectric absorbers[J].Applied Optic.,1999,38:4876-4884.
  • 9J.A.Dobrowolski,l.Li,R.A.Kemp.Metal/dielectric transmission interference filters with low reflectance.1.Design[J].Applied Optic.,1997,34:5673-5683.
  • 10Y.F.Zheng,K.Kikuchi,M.Yamasaki,K.Sonoi.Two-layer wideband antireflection coatings with an absorbing layer[J].Applied Optics.,1997,36:6335-6338.

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