类石墨碳膜的制备及其与类金刚石碳膜的区分

The Preparation of Graphite-like-carbon Film(GLC) and Difference From Diamond-like-carbon (DLC) Film

类金刚石碳膜的碳键结构一般以sp3为主,用离子束辅助磁控溅射制备了以sp2为主的非晶碳膜,即类石墨碳膜.分析类石墨碳膜的成分、组织结构,并通过这些结果区分类石墨碳膜与类金刚石碳膜.采用卢瑟福背散射谱(RBS)、x射线衍射(XRD)、透射电镜(TEM)、x射线光电子谱(XPS)、四点探针法(FPM)分析了成分、组织结构及电阻率,结果表明:制备碳膜的晶体结构是非晶,碳键结构以sp2为主,电阻率在10-4～10-2 Ω·(m之间.证明这种非晶碳膜不同于类金刚石碳膜(sp3为主).

The bond structure of amorphous carbon films is mainly sp^3. In this paper, the carbon films with bond structure of sp^2 were prepared by ion-beam-assistant magnetic spurttering technique. Different methods including RBS, XRD, TEM, XPS and FPM were employed for analyzing their structure. The results showed that the structure was amorphous, their bond structure was mainly sp^2 and electrical resistivity was 10^-4-10^-2 Ω·m, which differed from DLC （mainly sp^3）.