顶部平坦化32通道AWG的设计与研制

Design and Fabrication of Broadening the Spectral Response of a 32 Channels a AWG Demultiplexer

根据优化输入端多模干涉器(MMI)结构设计,研制出32通道50 GHz通道间隔、顶部平坦化的阵列波导光栅(AWG)器件。该器件的采用6μm×6μm折射率差为0.75%的Si基SiO2埋型波导结构,阵列波导数为130,罗兰圆半径为9 419.72μm,相邻阵列波导长度差为128.42μm。测试结果表明:AWG器件插入损耗(IS)为-5^-8.5 dB,串扰>-25 dB,3 dB带宽>0.25 nm。

By optimal design of a multimode interferometer（MMI） coupler in the input-side, a flattop 32 channels 50 GHz spaced arrayed-waveguide grating（AWG） demultiplexer was designed and fabricated. The silica buried-channel waveguide has the dimension of 6μm×6μm with the relative index difference of 0.75%, the number of arrayed waveguides is 130,the radius of Rowland circle is 9419.72μm and the Path length difference is 128.42μm. The device has worked effectively and the results show that the AWG＇s insertion loss （IS） is -5～8.5dB,the crosstalk is more than -25 dB and the 3 dB bandwidth is about 0.26 nm, owing to the high-resolution photomask and well-controlled fabrication processes.