摘要
用多孔Si(PS)圆柱空腔二维结构模型,理论研究了TE模式情况下PS/聚合物复合膜的等效折射率,给出了PS等效折射率与孔隙率和嵌入率的关系。实验采用波导耦合m线法分别研究了TE模和TM模入射情况下(633 nm波长处),孔隙率为73%的PS膜嵌入聚合物聚合基丙烯酸甲酯(PMMA)材料后的等效折射率与聚合物嵌入率的关系。理论分析与实验结果基本符合。
The equivalent refractive index of porous silicon(PS)/polymer composite film for TE polarization was studied by two-dimension model of cylindrical pore, The relationship between the equivalent refractive index of PS/PMMA and porosity of PS or volume fraction of polymer impregnated in PS was given. In experiments,the equivalent refractive index of PS film (porosity = 73% ) impregnated polymer PMMA with different volume fraction for TE and TM polarization in 633nm wavelength were measured respectively by m-line method. The theoretical results were consistent with experimental results.
出处
《光电子.激光》
EI
CAS
CSCD
北大核心
2005年第8期893-896,共4页
Journal of Optoelectronics·Laser
基金
国家自然科学基金资助项目(60267001)
中国科学院"西部之光"资助项目
自治区高校科研计划资助项目