多孔硅/聚合物复合膜等效折射率的研究

Study of Equivalent Refractive Index of Porous Silicon/Polymer Composite Films

用多孔Si(PS)圆柱空腔二维结构模型,理论研究了TE模式情况下PS/聚合物复合膜的等效折射率,给出了PS等效折射率与孔隙率和嵌入率的关系。实验采用波导耦合m线法分别研究了TE模和TM模入射情况下(633 nm波长处),孔隙率为73%的PS膜嵌入聚合物聚合基丙烯酸甲酯(PMMA)材料后的等效折射率与聚合物嵌入率的关系。理论分析与实验结果基本符合。

The equivalent refractive index of porous silicon（PS）/polymer composite film for TE polarization was studied by two-dimension model of cylindrical pore, The relationship between the equivalent refractive index of PS/PMMA and porosity of PS or volume fraction of polymer impregnated in PS was given. In experiments,the equivalent refractive index of PS film （porosity = 73% ） impregnated polymer PMMA with different volume fraction for TE and TM polarization in 633nm wavelength were measured respectively by m-line method. The theoretical results were consistent with experimental results.