摘要
采用电弧离子镀设备,以高纯Fe靶和Pd靶为原料,在TA1工业纯钛表面先后沉积Fe,Pd2层单金属薄膜。对样品分别进行700℃~1100℃,保温0.5h^3h的真空退火处理,使Fe膜和Pd膜之间形成扩散层,制备FePd磁性膜。重点研究了Fe,Pd及钛衬底之间的互扩散机制,膜层结构,薄膜的相组成。结果表明:在700℃,0.5h处理后FePd薄膜的合金化较好;在900℃,1h处理后虽有FePd相形成,但基体中的Ti已经扩散至表面;温度高于900℃且保温时间长于1h处理,不利于FePd膜的形成。
An iron （Fe） film and a palladium （Pd） film were deposited on a pure titanium substrate by using high pure Fe and Pd as target material in a multi-arc ion-plating apparatus. The diffusion heat-treatments were carried out at 700℃-1100℃ for 0.5～1h in vacuum. SEM and XRD were employed to characterize their structure and phase composition. EDS was used to identify their diffusion layer structure. The results show that Fe and Pd form a good alloy in films at 700℃ for 0.5h in vacuum. At 900℃ for 1h, there is a Fe-Pd phase, but titanium of substrate diffuses to surface of Fe-Pd films. At temperature〉900℃ for time〉1h, there is a bad Fe-Pd alloy film.
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
北大核心
2005年第8期1341-1344,共4页
Rare Metal Materials and Engineering
基金
国家自然基金课题(30470486/C010515)
