摘要
给出了一种基于虚拟仪器的光栅尺误差动态检测方法.以激光外差干涉仪为基准,利用虚拟仪器的软硬件技术实现自动控制、数据采集、动态检测、误差分析、列表输出等多项功能的光栅尺高精度检测.与传统检测方法相比,具有精度高、自动化程度高、速度快、测量结果直观清晰等优点,特别适用于光栅尺的在线检测.
A dynamic testing system based on NI technology for grating is presented. The error data of the grating are collected and processed dynamically by NI system. Compared with general method, the system can test a grating automatically in 10 seconds, error graphics, error data files, and other parameters also can be printed immediately. The system is designed for industrial manufacturing of grating.
出处
《光电技术应用》
2005年第4期35-37,共3页
Electro-Optic Technology Application
基金
深圳市科技局资助项目(9807)
关键词
虚拟仪器
光栅尺
动态检测
数据分析与处理
NI
grating
dynamic automatic testing
data analysing and processing
