摘要
微电机系统(MEMS)是在IC工艺技术基础上发展起来的一项重大科学技术,有着广阔的应用前景,但是它的测试问题从设计开始到批量生产,都面临着巨大的挑战。本文简单地论述了它们面临的测试问题。
MEMS based on IC technology has a prosperous future. However, there are many problems of MEMS testing from designing to mass production. To solve these problems, researchers in the industry field should united together. So that, new testing methods and testing equipments can be achieved.
出处
《国外电子测量技术》
2005年第8期3-3,共1页
Foreign Electronic Measurement Technology
