集成光栅器件与微细加工技术

INTEGRATED GRATING DEVICES AND MICROFABRICATION TECHNIQUES

集成光栅器件是光集成电路(OIC)和光电子集成电路(OEIC)中的重要功能器件,真有波导材料中光波长量级的微细周期结构,其制作技术要求极为苛刻,本文侧重介绍在集成光栅器件制备中的全息光刻、电子束和离子束等微细加工技术。

This article describes the importance of integrated grating devices in opticalintegrated circuits(OIC)and optical electronic integrated circuits(OEIC).They are microperiodic structures with the degree of wavelength in guidedmaterials.Their fabrication techniques are very strict.With emphasis on thisarticle the microfabrication techniques with holographic lithography and electron-beam and ion-beam,etc.in the preparation for integeated grating devices arediscussed.