摘要
回顾了弯曲旋转超声马达的发展简史;评述了目前国内个已有的几种弯曲旋转超声马达的驱动原理,结构特点和研究现状;介绍了一种新型实心金属柱状弯曲旋转超声马达;分析了弯曲旋转超声马达在微型化和产业化方面的问题,提出了进一步研究的问题。
Brief developing history of bending rotation ultrasonic motor is looked bace. New advances and structures and principle of bending rotation ultrasonic motor are reviewed in detail at home and abroad. A new solid metal cylinder ultrasonic motor using two orthogonal bending modes was reported. The problems of bending rotation ultrasonic motor are analyzed in micromation and industrialization. Some problems being worth researching are proposed.
出处
《微电机》
北大核心
2005年第4期72-75,共4页
Micromotors
基金
哈尔滨工业大学跨学科交叉性研究基金(HIT.MD2002.08)
哈尔滨市学科后备带头人基金(2002AFXXJ047)资助。
关键词
超声马达
弯曲
微型化
ultrasonic motor
bending
micromation