摘要
本文介绍了用于电工所自行研制的可变矩形电子束曝光机系统的手编格式图形数据转换软件的各种功能及设计思想。文中着重介绍了软件设计中的几个关健问题及其解决方法。
The paper describes the functions and designing ideas of the software forconverting the manual-oriented pattern data format to the final data formatused by the variable shape electron beam lithographic system of the IEE,Academia Sinica.The paper mainly describes the key problems in the softwaredesign and the way to solve them.
出处
《电工电能新技术》
CSCD
北大核心
1989年第2期24-30,共7页
Advanced Technology of Electrical Engineering and Energy
