用试样的光学显微镜标记为扫描电镜样台自动定位

AUTO-LOCATION OF SEM ANALYSIS WITH MARKS MADE ON SPECIMBN BY OPTICAL MICROSCOPE

矿物试样Ｘ射线微区分析过程中，搜索分析点耗费不少机时。用光学显微镜预先把试样分析点坐标标记在台控文件里，然后把文件送扫描电镜控制算机，经适当变换就可用于自动控制扫描电镜样品台找到分析点。本文介绍ＫＯＮＴＲＯＮ图象仪ＩＰＳ和带有ＥＤＡＸ能谱的扫描电镜上开发文件传递软件和数据格式转换软件，实现了扫描电镜按光学显微镜标记的试样分析点坐标自动定位。这是运用算机技术提高现有仪器测试水平的成功事例。

In clectron microprobe,analysis for mineral samples,it takes too much time for searching for analysing points.Using an optical microsco-pe to mark the coordinate of the analysing points of mineral samples in the files of the computer,then communicating the files to the control computer of ShM,the files,after converted,may be used to automatically control the SEM sample stage,then the analysing points may be searched out.In this paper,by developing the softwares of file transfer and data format tran-sformation on KONTION IPS and PHILIPS SLM-505 with EDAX energy spectrum,the SEM is automatically located in accordance with the coordi-nates of the analysing points marked with the optical microscope. This is a successful example of using the computer control technology to raise the exa-mination level with the available instruments.