用Wagner方程研究Ti衬底与Al膜间的反应和互扩散

A Study on the Interdiffusion between a Ti Substrate and an Al Film with Wagner's Equation

本文根据Ｔｉ与Ａ１膜间的反应和互扩散动力学提供的浓度分布曲线，用ｗａｇｎｅｒ方程计算Ｔｉ衬底与Ａ１膜间在Ｔｉ相变点（８８０℃）上、下Ａ１的互扩散系数Ｄ和激活能Ｑ，找出了互扩散系数与温度和成分的变化规律。计算结果表明，扩散激活能的大小次序是：ＱＴｉ３Ａｌ＞ＱＴｉＡｌ＞Ｑα－Ｔｉ（Ａｌ）＞Ｑβ－Ｔｉ（Ａｌ）．

In this paper, according to the Al concentration profiles of the reaction and interdiffusion between a Ti substrate and an Al film obtained in term of the theory of reaction kinetics, with the help of wagner's equation,we calculated the interdiffusion coefficient D and activation energy Q for the diffusion of Al in this system at the temperatures below and above the phase transformation point (880℃ ) of Ti. The relationship of diffusion coefficient which depends on temperature and composition was found out. The result shows that the activation energies are QTi3Al>QTiAl > Qα-Ti(Al) > Qβ-Ti(Al) .