利用铝＋氮或钛＋氮离子束辅助沉积改善纯铁摩擦学性能的研究

The Study on lmproving the Tribological Properties of Pure lron by Using Al+N+or Ti+N+lon Beam Assisted Deposition

离子束辅助沉积是近几年发展起来的一种将离子注入与薄膜沉积融为一体的材料表面改性新技术。利用Ａｌ＋Ｎ＋或Ｔｉ＋Ｎ＋离子束辅助沉积对工业纯铁进行了表面改性处理，并且就其摩擦学性能与未经表面改性处理之纯铁试样的作了对比试验研究，同时还利用俄歇电子能谱仪、掠角Ｘ射线衍射仪和扫描电子显微镜等分析测试手段对离子束改性层的成分深度分布和微观组织结构，以及磨痕的表面形貌和元素面分布进行了分析。结果表明，Ａｌ＋Ｎ＋或Ｔｉ＋Ｎ＋离子束辅助沉积可以在纯铁表面形成Ｆｅ４Ｎ、Ｆｅ３Ａｌ或Ｆｅ２Ｎ、Ｆｅ２Ｔｉ等强化相，因而使材料的表层显微硬度分别提高了２１．５％和５８．４％，稳态摩擦下的摩擦系数分别降低约８０％和８３％，平均磨损量分别降低约７１％和８６％；磨损形式主要由纯铁严重的粘着磨损转化为轻微的氧化磨损。

Ion beam assisted deposition(IBAD)is a new develoloped technology recently years。This is a technique in which the ion implantation is combined with the film deposition to improve thesurface properties of materials. the industrial pure iron was treated for surface modification with theaid of Al+N+or Ti+N+ion beam assisted deposition , and the tribological properties of trcated ironwere investigated as compared with those of pure iron. The change of component versus the depthdistribution,microstructure,the worn surface morphology and the surface distribution of elementswere analyzed with Auger electron spectroscopy(AES),glancing X-ray diffraction(GXRD ) andscanning electron microscopy。 The results showed that the compounds such as Fe4N and Fe3Al orFe2N and Fe2Ti etc。can be formed on the surface of pure iron after trcatment of Al+N+ orTi+N+ion beam assisted deposition,and the microhardness of surface layers of materials increases21.5%and 58.4%respectively; the friction coefficients decreases 80%and 83%respectivelyunder the stable friction condition;the main wear loss decrcases 71%and 86%respectively。 Thewear mechanism transferred from severe adhesive wear into lightly oxidation wear。