一种薄膜温度传感器的研制与性能试验

Development and performance Test of a Thin-Film Temperature TranSducer

以射频溅射法分别溅射沉积的Ａｌ２Ｏ３和ＭｇＯ复合层作为绝缘膜，以真空蒸镀的钛膜作为温度敏感膜和以溅射Ａｌ２Ｏ３膜作为保护膜，研制成功了一种宽度为１５μｍ的薄膜温度传感器．测试结果表明，复合层绝缘膜的绝缘性能明显地比Ａｌ２Ｏ３绝缘膜的好，经过同样的热处理后，前者能够保持其２０ＭΩ以上的电阻基本不变，而后者则由２０ＭΩ以上降低到１ｋΩ以下．在给定的试验条件下，这种传感器对温度及作用时间的信号响应敏感，而且重复性也相当好，可以用于测量工程实际中机械零部件接触润滑摩擦表面的瞬时温升．

A thin-film temperature transducer with 15 μm width has been developed.Its in-sulating layer is deposited with Al2O3 alternate with MgO by the radio-frequency sputteringmethod.As being the temperature measuring media,titanium in evaporated form is depositedon the surface of insulating layer,and a protective layer of Al2O3 is deposited on the titaniumband surface,Test resuIts showed that the insulation property of composite deposited insula-ting layer is much better than that of a layer of Al2O3.After the same heat treatment,theover 20 MΩ resistance of the composite layer has been kept well,but for the Al2O3 layer,thesame value has fallen below 1 kΩ.The results obtained by the thin-film temperature transdu-cer at some given conditions showed good repeatability and sensitive response to temperaturerise and its duration.So the transducer is available for use to measure the instantaneous temperature rise occured in practical lubricated contacts.