Si_3N_4-Al_2O_3-ZrO_2系陶瓷表面氧化层组成的EPMA分析

EPMA ON THE COMPOSITION OF THE Si_3N_4-Al_2O_3-ZrO_2 CERAMICS UKFACE OXIDATION LAYER

利用ＥＰＭＡ和ＸＲＤ的分析方法，研究了Ｓｉ＿３Ｎ＿４－Ａｌ＿２Ｏ＿３－ＺｒＯ＿２系陶瓷材料表面氧化层组成。结果表明，Ｓｉ＿３Ｎ＿４－Ａｌ＿２Ｏ＿３－ＺｒＯ＿２系陶瓷材料表面氧化层是由方石英相、ＺｒＳｉＯ＿４相和含有Ａｌ＿２Ｏ＿３、ＣａＯ等的ＳｉＯ＿２玻璃相所组成，其中ＳｉＯ＿２玻璃相中Ａｌ＿２Ｏ＿３、ＣａＯ等的含量，随着氧化时间的增加而逐渐增加。

篢he composition of surface oxidation layer Of Si_3N_4-Al_2O_3-ZrO_2 ceramics has been investi-gated with EPMA and XRD. The results indicate that the surface oxidation laver is constituted of cristobalite、ZrSiO_4 and a glass phase containing SiO_2 with impurities such as Al_2O_3 and CaO，The con-tents of these impurities increase with increasing oxidation time.