多通道半导体离子传感器的研究

THE STUDY OF MULTI-THOROUGHFARE SEMICONDUCTOR ION SENSORS

本文采用半导体工艺、封装技术、表面化学修饰技术制备多通道半导体离子传感器，该离子传感器能同时输出三个稳定的信号，通过钾离子敏感膜的实验，结果表明，传感器的响应性能良好。

By using semiconductor technology,the encapsulation technology and the surfacechemical modifying technology,multithoroughfare semiconductor ion sensors have been favri-cated correspondingly. The sensor showed many good characteristics,includir that three stabi-lization singnals of detection can be exported simultaneously by each sensor. The experimentionof K￣+ sensitive membranes shows that the averged slopes of K￣+ eponse are 56 mV/pK and theperformance of the sensors will satisfy the demand of applications.