摘要
利用Ａｕｇｅｒ电子能谱仪，对热丝ＣＶＤ法生长出的金刚石膜样品进行了表面探测。结果表明热丝系统中钨、钼、石英等材料对金刚石膜的污染影响很小，以至探测不到；生长系统和生长工艺对金刚石膜的质量有较大影响。
The analysis of AES(Auger electron spectroscopy)about the diamond films deposited by using filament CVD are carried out.It indicates that the pollution of diamonds films by W,Mo and SiO_2 materials is too small to be tested.The influence much of deposition system and technology on the quality of the diamond films.
出处
《人工晶体学报》
EI
CAS
CSCD
1995年第1期54-58,共5页
Journal of Synthetic Crystals
关键词
气相沉积法
电子谱
表面分析
金刚石薄膜
diamond films
CVD method
Auger electron spectroscopy
surface analysis
