非金刚石衬底表面气相生长金刚石薄膜的成核理论（Ⅰ）──光滑表面衬底

Nucleation Theory of Diamond on Nondianmood Substrates by Vapor Phase Growth Methods(Ⅰ)Smooth Surface Substrates

本文应用热力学成核理论研究了低压气相生长金刚石薄膜过程中，金刚石在非金刚石衬底表面的成核行为，在计入原子氢对稳定核和衬底刻蚀作用情况下，建立了平表面衬底上稳定原子团的生长方程及成核理论。该理论与已有的实验事实是一致的，并且在线性近似条件下得到了一些有意义的结果。

In this present paper,the nucleation of diamond on the smooth surfaces of nondiamond substrates in the low pressure vapor phase growth of diamond films have been studied by the thermodynamies nucleation theory。Based on the obtained experiment results,considering the obstruction effect of minute etching pits on nucleation and the atomic hydrogen etching,we have put forward the nucleation theory of diamond on the smooth surfaces of nondiamond substrates。The theory are identical with the results of experiments.