钨和钽丝碳化后的结构变化及其对金刚石成膜质量的影响

Phase Structure of W and Ta Filaments after Carburization and the influence on Diamond Film during CVD Growth

本文利用金相分析、Ｘ射线衍射等方法，对ＨＦＣＶＤ法沉积金刚石薄膜时使用的钨丝和钽丝在不同碳化条件下灯丝成分和结构变化作了分析研究，解释了碳化钽丝表面色泽金黄的原因，并在相同沉积条件下，比较了使用碳化和未碳化灯丝对生长金刚石薄膜的影响．结果表明，使用碳化灯丝生长的金刚石薄膜的石墨含量少，金刚石膜的质量和生长速度有所提高．

An investigation of the phase structure of W and Ta if ilaments after their carburization under different conditions has been carried out by using metallurgical microscopy, Xray diffractometer and Raman spectrograph. The influence of carburized or uncarburized filaments on the growth of CVD diamond films is also discussed here.