抗高温形变石英玻璃的研究

STUDY OF HIGH-TEMPERATURE-DEFORMATION-RESISTING QUARTZ GLASSES

抗高温变形石英玻璃是电子工业,特别是生产大规模集成电路不可缺少的关键配套材料。该产品可在,1280℃的高温下长期使用,使用温度比普通气炼石英玻璃提高,130℃,使用寿命延长1倍以上。其原理是在石英玻璃表面施以细分散氧化铝涂层,作为晶核剂,使石英玻璃表面形成微晶层,起骨架作用,从而达到抗高温形变的目的本文介绍了抗高温形变石英玻璃的制备过程和测试结果。并分析探讨了抗高温形变的原理,析晶特性以及应力的产生和消除方法等问题。

High-temperature-deformation-resisting quartz glasses are indispensable and key mating materials for elec- tronic industry, especially for producing large scale integrated circuits. This product can be used at a high tempera- ture of 1280℃ for a long time,its application temperature is 130℃ higher than that of ordinary quartz glass pro- duced with flame melting method, and its service life is over twice as long as that given by ordinary quartz glass made from the flame melting process.The theory of this process is that the fine-dispersive aluminum oxide as crys- tal nucleus agent is coated on the surface of the quartz glass,so that a microcrystalline layer is formed there, acting as skeleton resulting in high-temperature-deformation-resistance.The present paper described the preparation process and the measurement result of the high-temperature-deformation-resisting quartz glasses.In addition,the mechanism of high temperature deformation resistance,devitrification characteristic as well as formation and elimination method of the stress were analysed and discussed.