梳状电容传感器数学模型的改进和双目标优化

Improvement of Mathematical Model for the Comb-shaped Capacitive Transducer and Double Object Function Optimum Design

本文提出计算精度较高的能量法,对梳状电容传感器的数学模型作了改进。在此基础上,实现其多目标优化设计。

This paper deals with the optimum design of the comb-shaped capacitive transducer. Firstly.a computative method for establishing a mathematical model of transducer is proposed, and then the authors develop an optimum design of the double object function. The results have been examined by experiment data.