摘要
本文介绍紫外光/臭氧干法去除光刻胶的工作机理及实验装置;列出这种方法去除三种不同型号的国产负性光刻胶的去胶速率及利用俄歇光电子能谱仪分析去胶效果的能谱曲线;最后,对紫外光/臭氧干法去胶方法作了评价.
This paper describes the mechanism and the experimental apparatus for ultraviolet/ozone drydepolymerization of photoresists.The depolymerizing speed of three different types of negativephotoresists made in China and the Auger anylysis results for testing the UV/ozone depolymeri-zing efficiencies are given.Finally,the evaluations for UV/ozone depolymerization are made.
关键词
紫外光
臭氧
光刻胶
干法去胶
Ultravioletlight
Ozone
Photoresists
Dry depolymerization
