轴向二极场MWECR—CVD系统中放电过程的静电探针测量

INVESTIGATION OF DISCHARGE PROCESS WITH ELECTRICAL PROBE IN THE AXIAL TWO POLE FIELD MWECR-CVD SYSTEM

用静电单探针技术测定了MWECR—CVD系统中放电过程的等离子体参数,讨论了磁场的影响。

The plasma parameters of discharge process in the axial two pole field MWE CR - CVD system is investigated by the Langmuir probe. The effect of magnetic field on probe is discussed.